Simulations of Aerodynamic Damping for MEMS Resonators

Aerodynamic damping for MEMS resonators is studied based on the numerical solution of Boltzmann-ESBGK equation. A compact model is then developed based on numerical simulations for a wide range of Knudsen numbers. The damping predictions are compared with both Reynold equation based models and several sets of experimental data. It has been found that the structural damping is dominant at low pressures (high Knudsen numbers). For cases with small length-to-width ratios and large vibration amplitudes, the three-dimensionality effects must be taken into account. Finally, an uncertainty quantification approach based on the probability transformation method has been applied to assess the influence of pressure and geometric uncertainties. The output probability density functions (PDF) of the damping ratio has been studied for various input PDF of beam geometry and ambient pressure.